| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7443f9fa412762a1a5ba8390a27fc5e3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 |
| filingDate |
2013-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-08-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e43905af09a7f7bf4d7fcdf408e048c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4254eb46afc9c27e20259b49e7d5817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15cd9bc0ace70ed7365726f256281b52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86f3d8f32a5e58794eaa962cee1b5076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a45091ccd7f6807bbedd629da90434c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01c211cfc2b03b3f434e20efcfa3175b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1341d90c5cc20bf596000eb1deae7ef1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd02ec7b0f696e00a57932108e82a205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07723eb5a13384ae323584542395af52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae4d2e6fa1f4e28b0d16653abae628b3 |
| publicationDate |
2017-08-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I594840-B |
| titleOfInvention |
Method of making a grooved chemical mechanical honing layer |
| priorityDate |
2012-09-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |