http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I623752-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94c466b763c49a0f1ddbd6d5387db9d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36e2f31c97fb6a039db1cef779c8ddc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07357 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2014-02-11^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-05-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1318cccc186529872714d859e7b0aa6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d7941490ac99919357e2a08d42e8950 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a52cf2a4ac8bc35f97aaaa6321d28a83 |
| publicationDate | 2018-05-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I623752-B |
| titleOfInvention | Guide plate for probe card |
| abstract | The present invention provides a guide for a probe card that can cope with the miniaturization of the through holes and reduce the pitch by increasing the mechanical strength at the edge portions of the plurality of through holes. A guide for a probe card includes a substrate having a surface and a continuous perforation, an edge portion of the through hole, and a curved portion formed on the edge portion. The through hole is configured to guide a probe and includes an inner wall surface. The edge portion is formed by the surface of the crucible substrate and the inner wall surface of the through hole. The curved portion is formed of a hafnium oxide film. |
| priorityDate | 2013-03-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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