http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I654411-B

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-58
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01D3-028
filingDate 2013-03-20^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-03-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ead4eedd221ece502520fa52fc964336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4dab280a9cc16a2cd23beb832af6f93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf91ae4447d1e0410dc8ff5b4cdd3382
publicationDate 2019-03-21^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I654411-B
titleOfInvention Apparatus and method for laser interference suppression in transmission temperature measurement
abstract The invention discloses a device and a method for measuring the temperature of a substrate. The device includes a temperature-indicating radiation source, a temperature-indicating radiation detector, and a decorrelator, and the decorrelator is placed between light between the temperature-indicating radiation source and the temperature-indicating radiation detector. On the way. The decorrelator may be a wideband amplifier and / or a modal scrambler. The broadband amplifier may be a broadband laser, a Bragg grating, a Bragg fiber grating, a Raman amplifier, a Brien amplifier, or a combination thereof. The decorrelator is selected to emit radiation that is transmitted at least in part by the substrate being monitored. If the decorrelator is a driving gain device, the source matches the decorrelator, so that the emission spectrum of the source is within the gain bandwidth of the decorrelator.
priorityDate 2012-03-30^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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