http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I657550-B

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-4985
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B33Y80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B33Y10-00
filingDate 2015-02-12^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-04-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6e27b6fb09a3dd89074dc3dcabe1ccc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89c775c6ec64062fa67ca29d70537d5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c556e81593bc354b46276382248ded0
publicationDate 2019-04-21^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I657550-B
titleOfInvention Extensible sheet and method for manufacturing laminated wafer
abstract The present invention provides an extendable sheet capable of appropriately producing a laminated wafer including a most distal convex portion in a multi-projection workpiece, and a method of manufacturing a laminated wafer using the stretchable sheet.nn n n In order to solve the above problems, an extendable sheet 10 comprising a heat-shrinkable substrate 1 and an adhesive layer 2 laminated on one main surface of the substrate 1 and a processing region 10a by a plan view are provided. The first region 11a having the outer circumference of the processing region 10a as the outer circumferential region and the second region having the processing region 10a as the center on the inner peripheral side of the first region 11a located in the annular region 12a is formed, and the processing region is formed on the first main surface of the main surface on the side of the adhesive layer 2 closer to the substrate 1 of the extendable sheet 10, and should be adhered to the substrate 21 in the thickness direction in use. A region on the member to be processed 20 including a plurality of convex portions 22; the first region 11a includes a surface 11pa formed by the first projection 11p as a projection from the base region 1 with respect to the second region 12a. .
priorityDate 2014-02-13^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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