| abstract |
In order to appropriately supply raw materials using a heater, the fluid control device (100) includes a fluid heating unit (1) having a flow path or a fluid storage unit inside, and a heater (10) for heating the fluid heating unit. ), A heater comprising a heating element (10a) and a metal heat transfer member (10b) which is thermally connected to the heating element and is arranged to surround the fluid heating portion, and the heat transfer member is opposed to the fluid heating portion The surface is a surface (S1) which has been surface-treated to improve heat release. |