| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0827 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-12 |
| filingDate |
2019-12-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93ad4d09da8ab485091cedd97b6fc39c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04012326b614c60119c280b5ebbbda02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cadbd16d39eeb9f596dddc1b718f717b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9953dfa09e270843ccc8fddbd24aa05a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_427457808d1ee9483ea7623e94de66a6 |
| publicationDate |
2021-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I724679-B |
| titleOfInvention |
Preparation of triiodosilanes |
| abstract |
Provided is a process for preparing certain silane precursor compounds, e.g. n, triiodosilane from trichlorosilane utilizing lithium iodide in powder form and catalyzed by tertiary amines. The process provides triiodosilane in high yields and high purity. Triiodosilane is a precursor compound useful in the atomic layer deposition of silicon onto various microelectronic device structures. |
| priorityDate |
2018-12-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |