http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I735843-B

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filingDate 2019-01-25^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-08-11^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c86dc86a93ef93712e62f673fae55822
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publicationDate 2021-08-11^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I735843-B
titleOfInvention Micro-electro-mechanical-system microphone package
abstract A structure of micro-electro-mechanical-system (MEMS) microphone package includes a packaging substrate and an integrated circuit disposed on the packaging substrate. In addition, a MEMS microphone is disposed on the packaging substrate, wherein the MEMS microphone is electrically connected to the integrated circuit. A conductive adhesion layer is disposed on the packaging substrate, surrounding the integrated circuit and the MEMS microphone. A cap structure has a bottom part being adhered to the conductive adhesion layer. An underfill layer is disposed on the packaging substrate, covering an outer side of the conductive adhesion layer.
priorityDate 2018-08-27^^<http://www.w3.org/2001/XMLSchema#date>
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