| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30 |
| filingDate |
2017-05-23^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38cd25e82a1a164b8164ba569e4d5cf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db898ddee33d4610912764ded80091af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41f6103972a0d4dfc8a00a1bdd165942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3011026429d82e2e4312b40e9f1f2a2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3283ea3a5a60a58dd283f470a3fbfdfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4bbe1191104ae3102e6538e05a0b145 |
| publicationDate |
2018-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10153181-B2 |
| titleOfInvention |
Substrate treating apparatus and substrate treating method |
| abstract |
Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11328925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11508569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158523-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10497559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964525-B2 |
| priorityDate |
2016-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |