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filingDate 2016-08-03^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-12-18^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_785e89ee8a48fb9692099330d79ed940
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publicationDate 2018-12-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10156585-B2
titleOfInvention Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection
abstract The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.
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