| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0292 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0006 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2013-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-01-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbda43f4b0fb77f16dccea87f8d39b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc9458dedd474d0c0d32ac54b525533
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4db7411e5a0eed715a483e5f52e265c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69e8bbe11894ceb709e7534b95807479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b8f4b3225125f2cfa936eb24b174ccf |
| publicationDate |
2019-01-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10175188-B2 |
| titleOfInvention |
Trench based capacitive humidity sensor |
| abstract |
A trenched base capacitive humidity sensor includes a plurality of trenches formed in a conductive layer, such as polysilicon or metal, on a substrate. The trenches are arranged parallel to the each other and partition the conductive layer into a plurality of trenched silicon electrodes. At least two trenched silicon electrodes are configured to form a capacitive humidity sensor. The trenches that define the trenched silicon electrodes can be filled partially (e.g., sidewall coverage) or completely with polyimide (Pl) or silicon nitride (SiN). A polyimide layer may also be provided on the conductive layer over the trenches and trenched electrodes. The trenches and the trenched silicon electrodes may have different widths to enable different sensor characteristics in the same structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11262325-B2 |
| priorityDate |
2013-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |