| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14ba71eccbb5f65a22b78f39b3c6ffc3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0278 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0027 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-739
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-18 |
| filingDate |
2017-11-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-01-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40407e2bc70536bf211ed4abb7890fc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_397d2806ecbf1ab8faac9b71ff09497b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9366bf776b8c5baeea33802e72741f06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38517f3ade4fa0f5041f3bb1a86a85c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f13ca91bc445774bbb248645d1635fe4 |
| publicationDate |
2019-01-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10180406-B2 |
| titleOfInvention |
Semiconductor gas sensor device and manufacturing method thereof |
| abstract |
A semiconductor gas sensor device includes a first cavity that is enclosed by opposing first and second semiconductor substrate slices. At least one conducting filament is provided to extend over the first cavity, and a passageway is provided to permit gas to enter the first cavity. The sensor device may further including a second cavity that is hermetically enclosed by the opposing first and second semiconductor substrate slices. At least one another conducting filament is provided to extend over the second cavity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11391709-B2 |
| priorityDate |
2014-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |