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filingDate 2017-10-23^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-03-19^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09ea67f852809d6bc9a9a259c2d25fd0
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publicationDate 2019-03-19^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10236369-B2
titleOfInvention Techniques for forming non-planar germanium quantum well devices
abstract Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
priorityDate 2009-12-23^^<http://www.w3.org/2001/XMLSchema#date>
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