| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8ac4a4c00ea848d20858baaa446eddee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ba3adb332fbb794b08c641b73052e6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-105 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0608 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate |
2016-06-29^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-03-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74f2f0b86687d853ae3a92dd07f7ee6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8e314521065f49531c940f9466bfec0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc28198792d5b6425432a0c0662237c3 |
| publicationDate |
2019-03-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10240977-B2 |
| titleOfInvention |
Method for 2D/3D inspection of an object such as a wafer |
| abstract |
A method is provided for inspecting the surface of an object such as a wafer having tridimensional structures, using a confocal chromatic device with a plurality of optical measurement channels and a chromatic lens allowing optical wavelengths of a broadband light source to be focused at different axial distances defining a chromatic measurement range. The method includes a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object within the chromatic measurement range at a plurality of measurement points on the object by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels in a confocal configuration. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11442025-B1 |
| priorityDate |
2016-03-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |