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filingDate 2018-07-19^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-06-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10326920-B2
titleOfInvention Solid-state imaging device and method for manufacturing the same, and electronic apparatus
abstract The present disclosure relates to a solid-state imaging device, a method for manufacturing the same, and an electronic apparatus capable of improving sensitivity while suppressing degradation of color mixture. The solid-state imaging device includes an anti-reflection portion having a moth-eye structure provided on a boundary surface on a light-receiving surface side of a photoelectric conversion region of each pixel arranged two-dimensionally, and an inter-pixel light-blocking portion provided below the boundary surface of the anti-reflection portion to block incident light. In addition, the photoelectric conversion region is a semiconductor region, and the inter-pixel light-blocking portion has a trench structure obtained by digging the semiconductor region in a depth direction at a pixel boundary. The techniques according to the present disclosure can be applied to, for example, a solid-state imaging device of a rear surface irradiation type.
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