| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ba961bfb5c5b958381ba73241ed2ddf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2003-1204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B7-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-21 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2251 |
| filingDate |
2016-05-20^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1cecb7ec5698e0d1f1aeb47863e7f3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e907aab59d593892db48c242ddbc4eff |
| publicationDate |
2020-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10614991-B2 |
| titleOfInvention |
Electron beam apparatus comprising monochromator |
| abstract |
The present invention relates to an electron beam apparatus including a monochromator in which cylindrical electrostatic lenses for deflecting a path of an electron beam in the lenses are arranged symmetrically and an aperture including a plurality of selectable slits is disposed therebetween to be able to select an electron beam having a specified energy range. The electron beam apparatus has a monochromator having high resolution and excellent stability and maintainability by disposing slits and circular openings in one aperture part in parallel arrangement, thereby improving spatial resolution and energy resolution. |
| priorityDate |
2016-05-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |