| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23P15-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D7-0629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23P15-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23P15-16 |
| filingDate |
2018-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-08-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c59f0cfff20f1c83e80fbd17a07f2dfa |
| publicationDate |
2020-08-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10737359-B2 |
| titleOfInvention |
Manufacture of an orifice plate for use in gas calibration |
| abstract |
Methods and systems for preparing a hole having an accurately controlled area in an orifice plate for a mass flow controller are provided. Methods involve forming an initial hole in the orifice plate. The initial hole has an opening having an initial area. The orifice plate comprises a material that can react to form a coating on the orifice plate. The coating occupies a greater volume than the material consumed to form the coating. The material of the orifice plate is reacted with a reactant to produce the coating and thereby produce a reduced area hole having an opening with a reduced area that is smaller than the initial area. The reduced area hole is measured. A determined amount of the coating is removed from at least the reduced area hole to produce a final hole in the orifice plate, wherein the reduced area is smaller than an opening area of the final hole. |
| priorityDate |
2018-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |