| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6813f68bbadbcaae3828aa035190fede
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89b170728e9b1de7f20c98f2fbc2a113 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-766
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32798 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate |
2019-01-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51cffe52979b96db83815c55fdb89197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a1e4e729af35917ef626517db58ba79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc04c2b338975961a41d36f84b406c8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5622191e99e2f98655d6bb99dce681c |
| publicationDate |
2021-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11039527-B2 |
| titleOfInvention |
Air leak detection in plasma processing apparatus with separation grid |
| abstract |
Plasma processing apparatus and associated methods for detecting air leak are provided. In one example implementation, the plasma processing apparatus can include a processing chamber to process a workpiece, a plasma chamber separated from the processing chamber by a separation grid, and an inductive coupling element to induce an oxygen plasma using a process gas in the plasma chamber. The plasma processing apparatus can detect afterglow emission strength from reaction between nitric oxide (NO) and oxygen radical(s) in a process space downstream to an oxygen plasma to measure nitrogen concentrations due to presence of air leak. |
| priorityDate |
2019-01-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |