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filingDate 2019-07-24^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-07-06^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11053604-B2
titleOfInvention System for treating solution for use in electroplating application and method for treating solution for use in electroplating application
abstract Electroplating techniques including a system for treating a solution for use in an electroplating application and a method for using the system are provided. The system can have: a gas dispersing portion configured to treat the solution by dispersing a gas into the solution to control a concentration of a predetermined cation of a metal to be electroplated in the electroplating application; a filter portion configured to treat the solution by filtering the solution to remove a quantity of metal residue; and a circulation mechanism configured to divert the solution to one of a plating tool and a combination of the gas dispersing portion and the filter portion based on a result of an analysis of the solution.
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