http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11161146-B2

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filingDate 2016-08-19^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-11-02^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e6b29cb1dbfb7522fa2930953babd7d
publicationDate 2021-11-02^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11161146-B2
titleOfInvention IC die, probe and ultrasound system
abstract An integrated circuit die (1) is disclosed that comprises a substrate (30) defining a plurality of circuit elements; a sensor region (10) on the substrate, the sensor region comprising a layer stack defining a plurality of CMUT (capacitive micromachined ultrasound transducer) cells (11); and an interposer region (60) on the substrate adjacent to the sensor region. The interposer region comprises a further layer stack including conductive connections to the circuit elements and the CMUT cells, the conductive connections connected to a plurality of conductive contact regions on an upper surface of the interposer region, the conductive contact regions including external contacts (61) for contacting the integrated circuit die to a connection cable (410) and mounting pads (65) for mounting a passive component (320) on the upper surface. A probe including such an integrated circuit die an ultrasound system including such a probe are also disclosed.
priorityDate 2015-09-03^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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