http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11320457-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48de1cfdc993735cdc1c82f96827b33e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-06 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q40-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-30 |
| filingDate | 2019-07-24^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-05-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50bc48e8d22f7467024643419caaa820 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb88c17cb25613276beb37a6b87f445b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e183ead20f975de1df2bb73e08c0713 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b2afad44240f4c9f1aef7bf7ab067df |
| publicationDate | 2022-05-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-11320457-B2 |
| titleOfInvention | System and method of performing scanning probe microscopy on a substrate surface |
| abstract | The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system. A probe tip and substrate surface are moved relative to each other in one or more directions parallel to the scanning plane to position the probe tip to a scanning position on the substrate surface with the probe tip; a displacement is measured by an encoder of said probe tip in said one or more directions; and a fiducial pattern is provided fixed relative to the substrate surface, said fiducial pattern having a scannable structure that is scannable by said probe tip and said structure forming a grid of fiducial marks in said one or more dimensions; said grid dimensioned to allow for measuring placement deviations of the probe tip relative to the probe head by identifying one or more fiducial marks in the fiducial pattern. |
| priorityDate | 2018-07-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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