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filingDate 2019-09-18^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-06-07^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474c53eddab7e3a14385ae781908d69a
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publicationDate 2022-06-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11355626-B2
titleOfInvention High electron mobility transistor
abstract An HEMT includes an aluminum gallium nitride layer. A gallium nitride layer is disposed below the aluminum gallium nitride layer. A zinc oxide layer is disposed under the gallium nitride layer. A source electrode and a drain electrode are disposed on the aluminum gallium nitride layer. A gate electrode is disposed on the aluminum gallium nitride layer and between the drain electrode and the source electrode.
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