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filingDate 2020-09-24^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2023-01-10^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acee2aedae65067a83d2fc1bac774d00
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publicationDate 2023-01-10^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11552094-B2
titleOfInvention Three-dimensional memory device having on-pitch drain select gate electrodes and method of making the same
abstract A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, and an array of memory opening fill structures extending through the alternating stack, an array of drain-select-level assemblies overlying the alternating stack and having a same two-dimensional periodicity as the array of memory opening fill structures, a first strip electrode portion laterally surrounding a first set of multiple rows of drain-select-level assemblies within the array of drain-select-level assemblies, and a drain-select-level isolation strip including an isolation dielectric that contacts the first strip electrode portion and laterally spaced from the drain-select-level assemblies and extending between the first strip electrode portion and a second strip electrode portion.
priorityDate 2017-07-18^^<http://www.w3.org/2001/XMLSchema#date>
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