http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002028358-A1

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filingDate 2001-08-09^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8b74a90dc823ca9a82d7100f428b2b6
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publicationDate 2002-03-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002028358-A1
titleOfInvention Method for manufacturing thin-film magnetic recording medium
abstract A thin-film magnetic recording medium is produced by forming a laminate for magnetic data recording on a nonmagnetic substrate through a dry process, forming a protection layer on the laminate also through a dry process, plasma-etching the protection layer, and forming a lubricant layer on the plasma-etched protection layer. All steps are completed continuously in a vacuum without abrasion. The surface of the resulting recording medium is substantially smoother than the prior art.
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