patent/US-2002050744-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002050744-A1

Outgoing Links

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filingDate	2001-08-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_053195622082ec6030648b2f46b5b87c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3be9969f3cb70cb10f9706fca7014b66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a30e65663bed34b8a3b3fe01c02eff3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc5c5add36549ef750e84f9462568652
publicationDate	2002-05-02^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2002050744-A1
titleOfInvention	Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
abstract	An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
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priorityDate	2000-08-27^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

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