| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-08004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0346 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B11-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-1055 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate |
2002-03-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b6cbaed020a2b1049b5a410c949a469 |
| publicationDate |
2002-09-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002122450-A1 |
| titleOfInvention |
High repetition rate UV excimer laser |
| abstract |
The invention relates to an High Repetition Rate UV Excimer Laser which includes a source of a laser beam and one or more windows which include magnesium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include magnesium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6904073-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006233214-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006222034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003174754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003231687-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108183383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8855166-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6801562-B2 |
| priorityDate |
2001-03-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |