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filingDate 2001-12-21^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-09-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002134027-A1
titleOfInvention Aqueous dispersion, a process for the preparation and the use thereof
abstract A pyrogenic process is used to prepare alkali-doped silica particles. Particles produced by this process exhibit homogeneous doping, reduced agglomeration, greater stability and higher removal rates. Aqueous dispersions containing alkali-doped pyrogenic silica with average particle size less than 100 nm are used for polishing surfaces (CMP).
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