| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1501 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-08 |
| filingDate |
2001-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f23afb3ec9f2409e1ce12f86a7ce5ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01aa730dfb0b5d259c71015996614b63 |
| publicationDate |
2002-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002158198-A1 |
| titleOfInvention |
Charged particle beam apparatus |
| abstract |
It is an object of the present invention to provide a charged particle beam apparatus which can avoid charge-up without reducing the dose to a sample. For achieving such an object, the charged particle beam apparatus of the present invention is a charged particle beam apparatus comprising irradiating means for irradiating a sample with a charged particle beam, and imaging means for capturing a two-dimensional image of a secondary beam generated from the sample upon irradiation with the charged particle beam; wherein the irradiating means is means for irradiating a partial region within an imaging field of view of the imaging means with the charged particle beam by shaping a cross section of the charged particle beam; the apparatus further comprising moving means for moving the partial region such that the partial region scans the imaging field of view as a whole at least once. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9406480-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009101816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008251718-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7599050-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8742341-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7138629-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007206182-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8946631-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010237243-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005045821-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101549093-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7741601-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006169900-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9194826-B2 |
| priorityDate |
2000-03-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |