| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2002-08-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b68b290d61ae8b9a55b4e6d94b4485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dac66c599b16e07ca1a0b90e4ad6197 |
| publicationDate |
2003-01-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003012881-A1 |
| titleOfInvention |
Process for reducing the resistivity of an electrically conductive layer |
| abstract |
The resistivity of an electrically conductive layer of molybdenum or a molybdenum alloy is reduced. For that purpose, a MoO 2 layer is formed on the surface of the electrically conductive layer. The sheet resistivity can thereby be reduced in the order of magnitude of 10% to 15%. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8728928-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010282300-A1 |
| priorityDate |
2000-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |