| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2002-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c173beab7da4ee3a76d53501fd4466b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc4426e5618c3f9f32f4f7df8d527af0 |
| publicationDate |
2003-02-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003030079-A1 |
| titleOfInvention |
Damascene FeRAM cell structure |
| abstract |
A three-dimensional ferroelectric structure and fabrication method are provided. The ferroelectric capacitor structure permits immediate contact between a noble metal capacitor electrode and a transistor electrode. This direct connection minimizes process steps and electrical resistance between capacitor and transistor. A damascene capacitor electrode formation process makes the task of etching the noble metal less critical. Regardless of whether a noble metal capacitor electrode is used, the damascene formation process permits both larger, and more space efficient, capacitors. Further, the damascene capacitor formation process can be used to simultaneously form electrical interlevel interconnections to the transistor drain. Another variation of the invention provides for a dual damascene version of the ferroelectric capacitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7075134-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1463060-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6784475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7459318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1463060-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006194348-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004129961-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005010891-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11088154-B1 |
| priorityDate |
1999-06-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |