| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-08009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2258
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-038 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-22 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-036 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-223 |
| filingDate |
2002-07-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0bc6f5a8b8e26fc4fd3445ab77283f5 |
| publicationDate |
2003-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003133487-A1 |
| titleOfInvention |
Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nm |
| abstract |
An excimer or molecular fluorine laser system includes a wavelength calibration module permitting the wavelength of the narrow band output beam to be calibrated to a specific absolute wavelength. The module is preferably a lamp which contains at least one species including platinum with an optical transition within the emission spectrum of the laser system. Light from the lamp is preferably coincident at a spectrometer with a beam portion from the laser, and the laser beam wavelength is calibrated by simultaneous analysis at the spectrograph. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107492778-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006033912-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8520186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9715180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014319388-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010232469-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010195692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004151496-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102484350-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10036960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9271382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011205512-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108226123-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008240197-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7268869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6738406-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7244029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006060361-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006060361-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006077354-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8433201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011028246-A1 |
| priorityDate |
2000-06-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |