| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-05042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04042 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dc361bce4a3f8f27b9e0438690338ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fe6f7fe3116e8777209819c013317b7 |
| publicationDate |
2004-10-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004198057-A1 |
| titleOfInvention |
Method forming metal filled semiconductor features to improve structural stability |
| abstract |
A method for forming a metal filled semiconductor feature with improved structural stability including a semiconductor wafer having an anisotropically etched opening formed through a plurality of dielectric insulating layers revealing a first etching resistant layer overlying a conductive area; a plurality of dielectric insulating layers sequentially stacked to have alternating etching rates to a preferential etching process; subjecting the anisotropically etched opening to the preferential etching process whereby the sidewalls of the anisotropically etched opening are preferentially etched to produce etched dielectric insulating layers to form roughened sidewall surfaces; anisotropically etching through the etching resistant layer to reveal the conductive area; and, filling the anisotropically etched opening with a metal to form a metal filled semiconductor feature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105140301-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007082446-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009263938-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8017448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8659151-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008150060-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006148123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9330966-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012164831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11532579-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008315415-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005081883-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3940759-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7311857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4109507-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022013482-A1 |
| priorityDate |
2003-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |