| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4443e2dd816f475dfbef6da3affc1924 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-443 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22 |
| filingDate |
2004-09-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5afe42be2ff2c6be3ac1fe1a55b72b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3afa9bad1f47fc4f2403aeaec1393e9 |
| publicationDate |
2005-02-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005030531-A1 |
| titleOfInvention |
Method and device utilizing plasma source for real-time gas sampling |
| abstract |
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010032587-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101043353-B1 |
| priorityDate |
2000-11-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |