http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005052722-A1

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filingDate 2002-10-01^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c96fb9bad1804e7549e7aaeb7eced08
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publicationDate 2005-03-10^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005052722-A1
titleOfInvention Air gaps for optical applications
abstract An optical structure includes a substrate having two side surfaces. A first layer of high refractive index material is formed on the substrate. A sacrificial layer is formed on the first layer. A second layer of high refractive index material is formed on the sacrificial layer. At a predefined temperature the sacrificial layer is evaporated, thus forming an air gap between the first layer and the second layer.
priorityDate 2001-06-25^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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