http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005052744-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1857 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18 |
| filingDate | 2004-10-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7e4ee5ef6d6e503c5c2edef225f45ee |
| publicationDate | 2005-03-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005052744-A1 |
| titleOfInvention | Method of fabricating a fine optical grating element stamper |
| abstract | A method for fabricating an optical grating element stamper is disclosed. The method is modified from the fabrication process of a read-only optical disc to form a stamper with an optical grating element structure. The method features that a photoresist layer on a substrate is exposed to a light source, the light source moves along a plurality of concentric circles from inner circle to outer circle and intermittently exposes the photoresist layer to form an optical grating pattern on the substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011039031-A1 |
| priorityDate | 2003-08-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935 |
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