patent/US-2005064207-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005064207-A1

Outgoing Links

Predicate	Object
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classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45529 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
classificationIPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
filingDate	2004-04-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c41fd8a3335d01aa2012a07b4e75ab0b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba9e185e89382fac0c29615985fb6a1a
publicationDate	2005-03-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2005064207-A1
titleOfInvention	System and method for forming multi-component dielectric films
abstract	The present invention provides systems and methods for mixing precursors such that a mixture of precursors are present together in a chamber during a single pulse step in an atomic layer deposition (ALD) process to form a multi-component film. The precursors are comprised of at least one different chemical component, and such different components will form a mono-layer to produce a multi-component film. In a further aspect of the present invention, a dielectric film having a composition gradient is provided.
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