http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005179096-A1

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filingDate 2005-02-11^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ff0b75a3f477565f975f00afa4afd5c
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publicationDate 2005-08-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005179096-A1
titleOfInvention Complimentary nitride transistors vertical and common drain
abstract A semiconductor device and a method for manufacturing the device are disclosed in which the semiconductor device includes ohmic contacts on different planes and the method for manufacturing the device includes etching a semiconductor stack of different conductivity semiconductor layers in successive steps to create a first opening of a first width in a first semiconductor layer to expose another semiconductor layer, and then a second opening of a narrower width in the another layer, whereby a portion of the another layer remains exposed for receiving an ohmic contact.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9559012-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017039635-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008078604-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014107894-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013032906-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9331061-B2
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priorityDate 2004-02-12^^<http://www.w3.org/2001/XMLSchema#date>
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