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publicationDate 2005-09-15^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005199486-A1
titleOfInvention Refurbishment of sputtering targets
abstract In a method of refurbishing a deposition target, a surface of the target is provided in a process zone. An electrical arc is generated in the process zone, and a consumable metal wire is inserted into the process zone to form liquefied metal. A pressurized gas is injected into the process zone to direct the liquefied metal toward the surface of the target to splatter the liquefied metal on the surface, thereby forming a coating having the metal on at least a portion of the surface of the target that exhibits reduced contamination from the environment.
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