Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-312 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7846 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76235 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76289 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76264 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-01 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
filingDate |
2005-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd048eda0f99bdec917c707906a5b03c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0511513b4e08cb4ac462269b78d3b6b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b81df6fa0d4a7ee2946cd82e1925e5d7 |
publicationDate |
2006-01-12^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2006006442-A1 |
titleOfInvention |
Process for making a silicon-on-insulator ledge and structures achieved thereby |
abstract |
A process of making a partial silicon-on-insulator ledge is disclosed. A deep implantation region is created in a substrate. During a lateral cavity etch, the deep implantation region resists etching. The lateral cavity etch acts to partially isolate an active area above the deep implantation region. The deep implantation region is formed at various process stages according to embodiments. An active device is also disclosed that is achieved by the process. A system is also disclosed that uses the active device. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7445973-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8344436-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008079053-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006292766-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006292767-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2237315-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7605443-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005176222-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530288-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8669603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004238889-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7332790-B2 |
priorityDate |
2002-04-08^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |