| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1266 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78603 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322 |
| filingDate |
2004-11-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb02c81634fcea72f48cd417aa5482a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670df3a4666a6b312c76496fd427769c |
| publicationDate |
2006-04-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006073678-A1 |
| titleOfInvention |
System and method for hydrogen exfoliation gettering |
| abstract |
A hydrogen (H) exfoliation gettering method is provided for attaching fabricated circuits to receiver substrates. The method comprises: providing a Si substrate; forming a Si active layer overlying the substrate with circuit source/drain (S/D) regions; implanting a p-dopant into the S/D regions; forming gettering regions underling the S/D regions; implanting H in the Si substrate, forming a cleaving plane (peak concentration (Rp) H layer) in the Si substrate about as deep as the gettering regions; bonding the circuit to a receiver substrate; cleaving the Si substrate along the cleaving plane; and binding the implanted H underlying the S/D regions with p-dopant in the gettering regions, as a result of post-bond annealing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8354329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010270658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010244185-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010087046-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8030174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010283103-A1 |
| priorityDate |
2004-09-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |