| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b056baf77ec74bc6d841049700877004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d4d18e80b5f389afc61c3dbedaf2feb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0772ea2bc949e05b8baf4574948298c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2149cec66f4471bdb5835a49981bb64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate |
2006-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c531b1f36e753abfd8f71b7b65d60721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b126cf8a077ccdfd4f37993afa9ba99d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf699f51ee7ab29e5473ae7993e6e7c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7bc47891aca939c9da1741014796daa |
| publicationDate |
2006-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006191483-A1 |
| titleOfInvention |
Substrate susceptor for receiving a substrate to be deposited upon |
| abstract |
This invention includes substrate susceptors which receive substrates to be deposited upon. In one implementation, a substrate susceptor includes a body having a substrate receiving side. The substrate receiving side has a face having a substrate receiving recess formed therein. The recess has an outer peripheral sidewall. At least three projections extend outwardly from a portion of the face. The projections respectively comprise a radially inner sidewall which extends outwardly from the recess outer peripheral sidewall to a projection upper surface. Other aspects and implementations are contemplated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013025538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10167571-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015292815-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014287142-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010055318-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021242070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10316412-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102099216-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140096341-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102144280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104979166-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10526705-B2 |
| priorityDate |
2004-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |