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publicationDate 2006-09-28^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006214247-A1
titleOfInvention Getter deposition for vacuum packaging
abstract A device package that includes a thin film getter that is deposited on an inside surfaces of a device receiving vacuum sealed cavity or chamber. The thin film getter is deposited using, for example, sputtering, resistive evaporation, e-beam evaporation, or any other suitable deposition technique.
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