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publicationNumber US-2006264528-A1
titleOfInvention Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition
abstract A photosensitive composition comprising: (A) a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation, a pattern forming method using the photosensitive composition, and a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation.
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