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publicationDate 2007-05-03^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2007096103-A1
titleOfInvention Semiconductor device, annealing method, annealing apparatus and display apparatus
abstract The semiconductor device according to the present invention has a semiconductor layer having not smaller than two types of crystal grains different in size within a semiconductor circuit on a same substrate.
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