| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffd9b931018217e58d18b4db2ea4a366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81abb8abb71492e3c19fdd9ed3ce84db |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate |
2005-12-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef9089ca11f99755eeab5243b130cd36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33d1a9096c53abc36a7761764c803ca5 |
| publicationDate |
2007-06-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007144441-A1 |
| titleOfInvention |
Methods and arrangement for implementing highly efficient plasma traps |
| abstract |
An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007145020-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007145021-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8048329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7554053-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7679024-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8696997-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7562638-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010247403-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009278054-A1 |
| priorityDate |
2005-12-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |