| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0012 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-12 |
| filingDate |
2006-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8581380e4e820edd8b4351650eceb83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d9f29072db6621ab596b0bcc58754cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52ca99dc677633d568cc23e46a3ddb32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29f0505f1cd4a9d63e5356bc9490d468 |
| publicationDate |
2007-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007259127-A1 |
| titleOfInvention |
Method for densifying sol-gel films to form microlens structures |
| abstract |
A method for densifying sol-gel films to form microlens structures includes preparing a sol-gel precursor, having at least one solvent therein. The sol-gel precursor is spin coated onto a wafer to form a sol-gel film thereon. The wafer and sol-gel film are hot plate baked at a temperature less than 200° C. to remove at least some of the solvent. The baked, wafer and spin-coated sol-gel film are treated with an oxygen plasma treatment to remove any remaining solvent and to densify the sol-gel film. The spin coating, hot plate baking and treating steps may be repeated as required. A microlens is formed from the densified sol-gel film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9624383-B2 |
| priorityDate |
2006-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |