| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81f380da073beab2625e953ea7c8102a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a1ea176f1d6b414e2796f0f0e0d4ba5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad2e964dd988345cef0516c1287da21d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70986a6c625ca9aeb47bfcb1dc1d68f7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2341 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-034 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-22 |
| filingDate |
2007-08-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_511f369047b7bf1ba17a4585d3b36cc6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88f0325eb364f44ffdc3516dbf6b2106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd10bd3c6f64d2c39c72758d493244df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d88976017f5fcc9d39daf2547008224 |
| publicationDate |
2008-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008037609-A1 |
| titleOfInvention |
Excimer laser device |
| abstract |
An excimer laser device capable of suppressing deterioration of optical elements provided in a laser chamber even if output energy per pulse is increased more than the conventional level, in which a width of a laser beam applied to the optical elements provided in the laser chamber is enlarged so as to reduce the energy density of the laser beam within such a range that a laser output of no less than a desired level is obtained. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11087980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10535441-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476630-B1 |
| priorityDate |
2006-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |