| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-03529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2007-01-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa9e06d3fd3d084867f579d850553b3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c173beab7da4ee3a76d53501fd4466b2 |
| publicationDate |
2008-07-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008157354-A1 |
| titleOfInvention |
Multiple stacked nanostructure arrays and methods for making the same |
| abstract |
A method of fabricating a stacked nanostructure array includes preparing a substrate; forming a bottom electrode directly on the substrate; growing a first nanostructure array directly on the bottom electrode; forming an insulating layer on the first nanostructure array; exposing the upper surface of the first nanostructure array; depositing a second, and subsequent, nanostructure array on a nanostructure array immediately below the second and subsequent nanostructure array; repeating said forming, said exposing and said depositing a subsequent steps to form a stacked nanostructure array; removing an uppermost insulating layer; and forming a top electrode on an uppermost nanostructure array. A sensor incorporating the nanostructure array includes top and bottom electrodes with plural layers of nanostructure array therebetween. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9377431-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8443647-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9377432-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8288759-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8952431-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8890116-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9105702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10385390-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011162720-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9099542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8994080-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10908113-B2 |
| priorityDate |
2007-01-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |