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filingDate 2008-03-06^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35708deb23769a8eb5614e1c3ff095fb
publicationDate 2008-09-11^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008221346-A1
titleOfInvention Oriented-film formation apparatus and oriented film
abstract An oriented-film formation apparatus forms an oriented film on a substrate by obliquely evaporating a predetermined material in a vacuum state and includes an evaporation source having an organic-inorganic hybrid material.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9461075-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017181464-A1
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