http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008280065-A1

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filingDate 2005-04-01^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee711f7437ef2d973c5481c2507bd7a
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publicationDate 2008-11-13^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008280065-A1
titleOfInvention Method and Device for Generating a Low-Pressure Plasma and Applications of the Low-Pressure Plasma
abstract The present invention relates to a method for generating a low-pressure plasma, in which a partial vacuum is generated by means of a vacuum pump in a low-pressure chamber, and a plasma jet is introduced at higher pressure into the low-pressure chamber. The present invention also relates to various applications of the low-pressure plasma for surface pretreatment, for surface coating, or for treating gases. The present invention also relates to a device for generating a low-pressure plasma.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9737905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012067716-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019082525-A1
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priorityDate 2004-04-09^^<http://www.w3.org/2001/XMLSchema#date>
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