| abstract |
A base member with a bonding film that can be firmly bonded to an object with high dimensional accuracy and efficiently bonded to the object at a low temperature, a bonding method which is capable of efficiently bonding such a base member and the object at a low temperature, and a bonded body formed by firmly bonding the base member and the object with high dimensional accuracy and therefore being capable of providing high reliability are provided. The base member is adapted to be bonded to an object through the bonding film thereof. The base member includes a substrate, a bonding film containing metal atoms, oxygen atoms bonded to the metal atoms, and leaving groups each bonded to at least one of the metal and oxygen atoms, and having a surface, and an intermediate layer provided between the substrate and the bonding film, the intermediate layer having such a property that its thickness can be changed by applying stress thereto. When energy is applied to at least a predetermined region of the surface of the bonding film, the leaving groups, which exist in the vicinity of the surface within the region, are removed from the bonding film so that the region develops a bonding property with respect to the object. |